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Nanosciences and Biotechnology
> Physical Vapor Deposition

Physical Vapor Deposition

PRO Line PVD 75 Thin Film Deposition System

PVD

The PRO-Line PVD 75 is a versatile thin film deposition system offering single and multi-technique deposition options including thermal evaporation and electron beam (E-beam). With more than 400 units in service worldwide, the PVD 75 is a proven, robust, and versatile design. The PRO Line PVD 75 builds on the successes of the original design with improved system base pressures and pump down times. A technically superior chamber design, an industry best software control system with advanced programming capability, automatic substrate loading, and numerous features for optimized thin film performance are a few of the key advantages offered in this innovative, best of class design.

Features:

Thermal Evaporation
Electron Beam Evaporation
Load lock for fast sample loading
4 pocket Electron E-beam source
4 4" thermal evaporation sources
Quartz crystal controller
5 Crystal sensors for film thickness control

Equipment Training Request

Reservations

User Manual

More Information

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Thin Film Deposition for Lift-Off Processes

Organic Electronics (OLEDs & OPVs)

PVD of Superconducting Thin Films; Qubits & Josephson Junctions

PVD of Magnetic Thin Films

Physical Vapor Deposition (PVD) of Indium Bumps

Perovskite Thin Films for Photovoltaics & Electronics

Solid-State Lithium Thin Film Batteries